How Operating Conditions Influence Wafer Heater Design Choices

https://precision-thermal-lab.meridiannest.com/posts/ito-glass-heater-vs-conventional-heating-elements-key-differences

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result